Particle source for producing excited particles

Particle source, especially for reactive ionic etching and plasm

Particulate collector apparatus and method for ion generators

Penning discharge ion source with self-cleaning aperture

Phase and frequency control of a radio frequency generator...

Planar crossed-field plasma switch and method

Planar gas introducing unit of a CCP reactor

Plasma accelarator arrangement

Plasma accelerating apparatus and plasma processing system...

Plasma accelerator with closed electron drift

Plasma accelerator with closed electron drift

Plasma accelerator with closed electron drift

Plasma accelerator with closed electron drift and conductive ins

Plasma apparatus

Plasma apparatus

Plasma apparatus including plasma-measuring device

Plasma beam generating method and apparatus which can generate a

Plasma cathode

Plasma cleaning device

Plasma coil