4. Coating apparatus
  5. With means to centrifuge work
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Spin-coating apparatus for use in manufacturing...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spindle sleeve for coater/developer

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spinner and method for processing a substrate

Coating apparatus – With means to centrifuge work
Patent

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Spinner chuck for non-circular substrates

Coating apparatus – With means to centrifuge work
Patent

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Spinning platen paint set

Coating apparatus – With means to centrifuge work
Patent

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Stretcher means for use in a spin art machine

Coating apparatus – With means to centrifuge work
Patent

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Substrate coating apparatus

Coating apparatus – With means to centrifuge work
Patent

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Substrate coating apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Substrate holder for a substrate spin treating apparatus

Coating apparatus – With means to centrifuge work
Patent

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Substrate processing apparatus and air supply method in substrat

Coating apparatus – With means to centrifuge work
Patent

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Substrate processing apparatus and substrate processing method

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Substrate processing method and substrate processing apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Substrate processing unit

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Substrate spin coating apparatus

Coating apparatus – With means to centrifuge work
Patent

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Substrate spin treating apparatus

Coating apparatus – With means to centrifuge work
Patent

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Substrate spinning apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Swinging buckets

Coating apparatus – With means to centrifuge work
Patent

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System for processing a workpiece

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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System for processing a workpiece

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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System for processing semiconductor wafers producing a...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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