Spinner and method for processing a substrate

Details Spinner and method for processing a substrate Spinner and method for processing a substrate

1985-03-04

1987-01-06

McIntosh, John P.

Coating apparatus

With means to centrifuge work

118 57, 118501, B05C 1302, B05C 1102

Patent

active

046338047

ABSTRACT:
A spinner mainly used for spinning treatment of a semiconductor wafer, having a means for generating supersonic power to be transmitted to a supersonic vibration transducer embedded inside a spinning disk so that the supersonic vibration is applied to a processing liquid material dispensed on a work piece held on the center portion of the rotating spinning disk. As a result, particles or air bubbles of small size involved in the layer of liquid material are effectively removed from the liquid layer, resulting in improving fabrication yield and reliability of the product.

REFERENCES:
patent: 3791342 (1974-02-01), Boyer et al.
patent: 4124411 (1978-11-01), Meuleman et al.

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