Spinner chuck for non-circular substrates

Details Spinner chuck for non-circular substrates Spinner chuck for non-circular substrates

1975-10-06

1977-05-24

Kaplan, Morris

Coating apparatus

With means to centrifuge work

269 21, B05C 1112

Patent

active

040248356

ABSTRACT:
A spinner chuck having a recessed portion for receiving non-circular substrates is used to alleviate uneven build-up of photoresist coatings applied on the substrate. Openings are disposed in the base of the recess about the periphery thereof whereby to drain off coating material spun off into the volume between the substrate and chuck sidewall defining said recess.

REFERENCES:
patent: 1811395 (1931-06-01), Hoxie et al.
patent: 2398959 (1946-04-01), Petry
patent: 2833680 (1958-05-01), Kneeling
patent: 3389682 (1968-06-01), Gardner
patent: 3577267 (1971-05-01), Preston, Jr. et al.

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