Substrate spin treating apparatus

Details Substrate spin treating apparatus Substrate spin treating apparatus

1997-10-06

1999-06-29

Edwards, Laura

Coating apparatus

With means to centrifuge work

118 56, 118319, 118320, 118500, 118503, 134902, 134153, B05C 500

Patent

active

059163666

ABSTRACT:
A substrate treating apparatus for performing a predetermined treatment of a substrate in a spin, has a spin motor including a rotor having a hollow opening centrally thereof, and a stator disposed coaxially with the rotor and having a hollow opening centrally thereof. The rotor includes holders for supporting the substrate in three peripheral positions thereof. A support mechanism switches the holders between a position for supporting the substrate, and a position retracted therefrom. The opposite surfaces of the substrate supported by the holders are cleaned with a cleaning solution supplied through nozzles. The holders have a substrate supporting force derived from a weight and magnetism of the support mechanism, to support the substrate reliably. A guide is disposed in the hollow of the rotor, and connected to the rotor. The holders are arranged in a substrate treating space formed inwardly of the guide. The holders are arranged on the guide. Thus, the spin motor is protected from exposure to a treating solution atmosphere.

REFERENCES:
patent: 4286541 (1981-09-01), Blackwood
patent: 5480484 (1996-01-01), Kelley et al.

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