System for processing a workpiece

Details System for processing a workpiece System for processing a workpiece

2006-02-14

2006-02-14

Fiorilla, Chris (Department: 1734)

Coating apparatus

With means to centrifuge work

C118S612000, C118S326000

Reexamination Certificate

active

06997988

ABSTRACT:
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to be rotated by a motor. The workpiece housing forms a substantially closed processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. A sump is connected to an inlet and an outlet in the chamber. Rotation of the workpiece housing recirculates fluid into the chamber.

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