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Spin bowl having fluid seal for preventing air from flowing...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating apparatus

Coating apparatus – With means to centrifuge work
Patent

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Spin coating apparatus for forming a photoresist film over a sub

Coating apparatus – With means to centrifuge work
Patent

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Spin coating apparatus having a horizontally linearly movable wa

Coating apparatus – With means to centrifuge work – Reciprocating centrifuge
Patent

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Spin coating apparatus including aging unit and solvent...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating apparatus using a tilting chuck

Coating apparatus – With means to centrifuge work – Plural axes of rotation of work
Patent

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Spin coating apparatus with an independently spinning enclosure

Coating apparatus – With means to centrifuge work
Patent

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Spin coating apparatus with an upper spin plate cleaning nozzle

Coating apparatus – With means to centrifuge work
Patent

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Spin coating bowl

Coating apparatus – With means to centrifuge work
Utility Patent

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Spin coating bowl

Coating apparatus – With means to centrifuge work
Patent

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Patent

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Spin coating bowl exhaust system

Coating apparatus – With means to centrifuge work
Patent

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Spin coating of substrate with chemical

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin coating spindle and chuck assembly

Coating apparatus – With means to centrifuge work
Patent

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Spin coating spindle and chuck assembly

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin cup and spin cup drive for applying viscous materials

Coating apparatus – With means to centrifuge work – Coating inside of hollow work
Patent

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Spin-coater with self-cleaning cup and method of using

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Spin-coating apparatus and coated substrates prepared using...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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