Spin coating bowl exhaust system

Details Spin coating bowl exhaust system Spin coating bowl exhaust system

1996-06-21

1998-06-23

Czaja, Donald E.

Coating apparatus

With means to centrifuge work

118 56, 118319, 118320, B05C 1102

Patent

active

057699453

ABSTRACT:
An apparatus for exhausting coating materials used in the process of spin coating a top surface of a wafer, the wafer having an edge and a bottom surface that is supported and rotated by a rotatable chuck attached by a shaft to a spin motor. The apparatus includes a bowl having an exhausted drain configured to receive excess liquid and vapor from the spin coating and an assembly configured to maintain the drain at a negative pressure differential relative to the bowl. In a preferred embodiment, a baffle is attached to the bottom to limit the flow of the liquid and vapor into the drain to a predetermined direction.

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patent: 5677000 (1997-10-01), Yoshioka et al.
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