4. Coating apparatus
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Dome: shape and temperature controlled surfaces

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Dosimetry cup charge collection in plasma immersion ion implanta

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Double slit-valve doors for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Double slit-valve doors for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Downstream plasma using oxygen gas mixture

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Downstream plasma using oxygen gas mixtures

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Downstream sapphire elbow joint for remote plasma generator

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Dry etching method, chemical vapor deposition method, and appara

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Dual face shower head magnetron, plasma generating apparatus...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Dual frequency excitation of plasma for film deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Dual substrate loadlock process equipment

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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