Heating crucible and deposition apparatus including the same

Details Heating crucible and deposition apparatus including the same Heating crucible and deposition apparatus including the same

2011-04-12

2011-04-12

Kackar, Ram N. (Department: 1716)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S720000, C219S420000

Reexamination Certificate

active

07922820

ABSTRACT:
A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.

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