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Post-ion implant cleaning for silicon on insulator substrate...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Post-treatment method for dry etching

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Pressure pulse method for removing debris from nuclear fuel asse

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Procedure and device for cleaning disk-shaped objects in particu

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process and apparatus for ashing treatment

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process and apparatus for removing liquid impurities...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Process and apparatus for the treatment of semiconductor wafers

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process and device for treating screenings from the mechanical c

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process and equipment for cleaning large electromechanical parts

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process and machine for cleaning parts

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process and machine for treating flat surfaces

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process and system for treatments by fluids

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Process for chlorine trifluoride chamber cleaning

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process for cleaning a glass-coating reactor using a...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Process for cleaning a substrate using a barrier discharge

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process for cleaning an assembled spin pack of a melt spinning a

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process for cleaning and drying ferrous surfaces without causing

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Process for cleaning and/or disinfecting and/or maintaining medi

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process for cleaning comminuted plastic material

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Process for cleaning metal articles

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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