Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2005-02-22
2005-02-22
Chen, Bret (Department: 1762)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C438S905000, C427S534000, C427S535000
Reexamination Certificate
active
06857433
ABSTRACT:
A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of Si3N4or SiO2; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.
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Bodette Richard R.
Cording Christopher Robert
Henderson Philip Bruce
Johnson Andrew David
Johnson Herbert David
Air Products and Chemicals Inc.
Chen Bret
Wolff Robert J.
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