Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1997-07-24
2000-02-08
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134153, 134157, 134902, B08B 600, B08B 300
Patent
active
060217855
ABSTRACT:
Procedure and device for cleaning disk-shaped objects, in particular wafers, with sonification and water as rinsing medium and coupling liquid between the ultrasonic transmitter and the surface which is to be cleaned, whereby the wafer is preferentially held by vacuum suction on a rotating plate and the radiating surface of an ultrasonic transmitter is approached to the surface which is to be cleaned to within a distance in the millimeter range and a flowing film of ultra-pure water is produced between the disk surface and the radiating transmitter surface. The particles dislodged from the disk surface by the sonification are carried away by the flowing water and ejected radially with the water by rotating the disk. The ejected water impinges on the sidewalls of a trough and is drained away without splashing. The size difference of the ultrasonic transmitter surface and the disk surface which is to be cleaned is compensated for by the relative motion between the ultrasonic transmitter and the disk, whereby the entire surface area of the disk is successively scanned by the ultrasonic transmitter.
REFERENCES:
patent: 4564280 (1986-01-01), Fukuda
patent: 5032217 (1991-07-01), Tanaka
patent: 5368054 (1994-11-01), Koretsky et al.
patent: 5375291 (1994-12-01), Tateyama et al.
patent: 5562772 (1996-10-01), Neoh
Grutzediek Hartmut
Scheerer Joachim
Gulakowski Randy
Wilkins Yolanda E.
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