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Magnetron sputtering apparatus and thin film depositing method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus for single substrate processing

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering apparatus with an integral cooling and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering cathode

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering cathode apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode assembly and magnet assembly theref

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode for vacuum coating apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode for vacuum coating apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode mechanism

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode with electrically variable source s

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode with magnet disposed between...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering cathode with magnet disposed between...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering devices

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering etching apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering method and apparatus for compound thin film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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