Retaining ring for holding semiconductor wafers in a...
Retaining ring with a three-layer structure
Reticle adapter for a reactive ion etch system
Reusable wafer support for semiconductor processing
RF antenna assembly for treatment of inner surfaces of tubes...
RF bias control in plasma deposition and etch systems with...
RF Coupling techniques
RF current return path for a large area substrate plasma...
RF ground switch for plasma processing system
RF plasma etch reactor with internal inductive coil antenna and
RF plasma reactor with hybrid conductor and multi-radius...
RF plasma reactor with hybrid conductor and multi-radius...
RF plasma source for cleaning spacecraft surfaces
RF power delivery for plasma processing using modulated...
RF power supply with integrated matching network
RF powered plasma enhanced chemical vapor deposition reactor...
RF powered plasma enhanced chemical vapor deposition reactor...
RF pulsing of a narrow gap capacitively coupled reactor
RIE Apparatus utilizing a shielded magnetron to enhance etching
Ring-shaped component for use in a plasma processing, plasma...