Bubble plate for etching and etching apparatus using the same

Details Bubble plate for etching and etching apparatus using the same Bubble plate for etching and etching apparatus using the same

2008-07-01

2008-07-01

Hassanzadeh, Parviz (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

Reexamination Certificate

active

07393431

ABSTRACT:
An etching apparatus is disclosed, in which a bubble plate includes a plurality of air tubes having a plurality of holes being arranged in a straight line, and a straight frame having an air path and being connected to both ends of the air tube. The etching apparatus of the present invention reduces the probability of prolonged exposure to harmful chemicals by workers. Additionally, the guide does not have to be separated from the etching apparatus to separate the bubble plate. The etching apparatus reduces the probability of etching inferiority and/or substrate damage caused by incorrect assembly.

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“Polyvinyl resins” by Manson, in AccessScience@McGraw-Hill, http://www.accessscience.com, DOI 10. 1036/1097-8542.537500, last modified: Apr. 10, 2000.

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