Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate
2007-11-29
2010-10-12
Hassanzadeh, Parviz (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With gas inlet structure
C156S345330, C156S345350, C118S7230ME
Reexamination Certificate
active
07811409
ABSTRACT:
Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.
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Chen Anthony L.
Egley Fred D.
Kang Michael S.
Kuo Jack
Morel Bruno
Buchanan & Ingersoll & Rooney PC
Dhingra Rakesh
Hassanzadeh Parviz
Lam Research Corporation
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