Multiple zone gas distribution apparatus for thermal control...

Details Multiple zone gas distribution apparatus for thermal control... Multiple zone gas distribution apparatus for thermal control...

2007-01-02

2007-01-02

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C118S724000

Reexamination Certificate

active

10600273

ABSTRACT:
A gas distribution apparatus delivers a coolant gas, such as helium, to an upper surface of a chuck for controlling a temperature of a wafer placed on the chuck. The gas distribution apparatus allows first and second zones, such as an inner zone and an outer zone of the chuck, to be supplied with a coolant gas at different pressures for control of the temperature across the wafer. The gas distribution apparatus includes a pressure and flow control system for supplying the coolant gas at selected pressures and bleed lines which provide the dual function of allowing rapid evacuation of the inner and outer zones and preventing excess pressure from one zone from migrating to another zone.

REFERENCES:
patent: 5320982 (1994-06-01), Tsubone et al.
patent: 5439026 (1995-08-01), Moriya et al.
patent: 5609720 (1997-03-01), Lenz et al.
patent: 5715132 (1998-02-01), Steger et al.
patent: 5761023 (1998-06-01), Lue et al.
patent: 5835334 (1998-11-01), McMillin et al.
patent: 5937541 (1999-08-01), Weigand et al.
patent: 5992046 (1999-11-01), Weigand et al.
patent: 6015595 (2000-01-01), Felts
patent: 6245192 (2001-06-01), Dhindsa et al.
patent: 6254683 (2001-07-01), Matsuda et al.
patent: 6320736 (2001-11-01), Shamouilian et al.
patent: 6373679 (2002-04-01), Qiao et al.
patent: 2001/0052359 (2001-12-01), Ikeda
patent: 01251735 (1989-10-01), None
patent: 10163308 (1998-06-01), None

Affiliated with

Also associated with

Rating

Multiple zone gas distribution apparatus for thermal control... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multiple zone gas distribution apparatus for thermal control..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple zone gas distribution apparatus for thermal control... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3768755