Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate
2007-04-17
2007-04-17
Kackar, Ram N. (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With workpiece support
C118S728000, C118S720000, C427S534000, C156S345300
Reexamination Certificate
active
10259306
ABSTRACT:
The present invention presents an improved bellows shield for a plasma processing system, wherein the design and fabrication of the bellows shield coupled to a substrate holder electrode advantageously provides protection of a bellows with substantially minimal erosion of the bellows shield.
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Mitsuhashi Kouji
Nakayama Hiroyuki
Saigusa Hidehito
Takase Taira
Kackar Ram N.
Tokyo Electron Limited
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