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Micromachine and production method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromachine device with a spatial portion formed within

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromachined acceleration activated mechanical switch and...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromachined assembly with a multi-layer cap defining a cavity

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromachined device having electrically isolated components...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature
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Micromachined device with ground plane under sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromachined electromechanical (MEM) random access memory...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromachined electromechanical device

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromachined microphone and multisensor and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromachined oscillating element, in particular a mirror...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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Micromachined relay and method of forming the relay

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Micromachined relay and method of forming the relay

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Micromachined structure with a deformable membrane and...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical and microoptomechanical structures with...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical cap structure and a corresponding production...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical cap structure and the respective...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical capacitive transducer and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical component

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Micromechanical component

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Micromechanical component and corresponding method for its...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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