Micromachine and production method thereof
Micromachine device with a spatial portion formed within
Micromachined acceleration activated mechanical switch and...
Micromachined assembly with a multi-layer cap defining a cavity
Micromachined device having electrically isolated components...
Micromachined device with ground plane under sensor
Micromachined electromechanical (MEM) random access memory...
Micromachined electromechanical device
Micromachined microphone and multisensor and method for...
Micromachined oscillating element, in particular a mirror...
Micromachined relay and method of forming the relay
Micromachined relay and method of forming the relay
Micromachined structure with a deformable membrane and...
Micromechanical and microoptomechanical structures with...
Micromechanical cap structure and a corresponding production...
Micromechanical cap structure and the respective...
Micromechanical capacitive transducer and method for...
Micromechanical component
Micromechanical component
Micromechanical component and corresponding method for its...