Microelectromechanical device
Microelectromechanical device including an encapsulation...
Microelectromechanical device using resistive...
Microelectromechanical device with integrated conductive shield
Microelectromechanical devices and fabrication methods
Microelectromechanical flexible membrane electrostatic valve...
Microelectromechanical integrated microloading device
Microelectromechanical structures defined from silicon on...
Microelectromechanical switch
Microelectromechanical system
Microelectromechanical systems and devices having thin film...
Microelectromechanical systems encapsulation process
Microelectromechanical systems having trench isolated...
Microelectromechanical systems having trench isolated...
Microelectromechanical systems, and devices having thin film...
Microelectromechanical thin-film device
Microelectromechanical tunneling gyroscope and an assembly...
Microelectronic 3D bipolar magnetotransistor magnetometer
Microelectronic device with anti-stiction coating
Microelectronic devices having interconnects with planarized spu