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Microelectromechanical device

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical device including an encapsulation...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Microelectromechanical device using resistive...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical device with integrated conductive shield

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical devices and fabrication methods

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical flexible membrane electrostatic valve...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical integrated microloading device

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent

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Microelectromechanical structures defined from silicon on...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical switch

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical system

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical systems and devices having thin film...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Microelectromechanical systems encapsulation process

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical systems having trench isolated...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectromechanical systems having trench isolated...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Microelectromechanical systems, and devices having thin film...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Microelectromechanical thin-film device

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Microelectromechanical tunneling gyroscope and an assembly...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectronic 3D bipolar magnetotransistor magnetometer

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
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Microelectronic device with anti-stiction coating

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Microelectronic devices having interconnects with planarized spu

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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