Carrier having pistons for distributing a pressing force on...

Carrier head design for a chemical mechanical polishing apparatu

Carrier head for a chemical mechanical polishing apparatus

Carrier head for a chemical mechanical polishing apparatus

Carrier head for chemical mechanical polishing

Carrier head having location optimized vacuum holes

Carrier head vibration damping

Carrier head with a compressible film

Carrier head with a flexible membrane for chemical...

Carrier head with a modified flexible membrane

Carrier head with edge load retaining ring

Carrier head with local pressure control for a chemical mechanic

Carrier head with multi-part flexible membrane

Carrier head with pressure transfer mechanism

Carrier head with retaining ring and carrier ring

Center clamp

Chemical mechanical polishing head having floating wafer...

Clamp for connecting/disconnecting a rotary head to/from a...

Clamp mechanism for rotary tool disc

Clamping device for the exact manual resharpening of knife...