Carrier head with edge load retaining ring

Details Carrier head with edge load retaining ring Carrier head with edge load retaining ring

2005-05-10

2005-05-10

Hall, III, Joseph J. (Department: 3723)

Abrading

Work holder

Work rotating

C451S041000, C451S177000, C451S285000, C451S286000, C451S287000, C451S288000, C451S289000, C451S364000, C451S388000, C451S399000

Reexamination Certificate

active

06890249

ABSTRACT:
A carrier head for chemical mechanical polishing of a substrate having a front surface, a back surface and an edge. The carrier head has a base, an inner retaining ring positioned beneath the base, and an outer retaining ring surrounding the inner retaining ring to retain the inner retaining ring. The inner retaining ring has a main portion with a first surface to apply a load to a perimeter portion of the back surface of the substrate and an annular lower projection protruding downwardly from the main portion with a second surface to circumferentially surround the edge of the substrate to retain the substrate.

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