Carrier head with a modified flexible membrane

Details Carrier head with a modified flexible membrane Carrier head with a modified flexible membrane

2005-02-15

2005-02-15

Eley, Timothy V. (Department: 3724)

Abrading

Work holder

Work rotating

C451S288000, C451S290000

Reexamination Certificate

active

06855043

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a load to a substrate and a retaining ring. The friction coefficient of the lower surface of the flexible membrane is increased to prevent contact between the substrate and the retaining ring, thereby preventing slurry compaction and buildup and substrate deformation caused by such contact.

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