Abrasive articles and methods for the manufacture and use of...

Abrasive processing apparatus and method employing encoded...

Active centering apparatus with imbedded shear load sensor and a

Adjustable force applying air platen and spindle system, and...

Advanced chemical mechanical polishing system with smart...

Advanced finishing control

Advanced finishing control

Afferent-based polishing media for chemical mechanical...

Apparatus and method for controlling fluid material...

Apparatus and method for controlling polishing of integrated cir

Apparatus and method for gauging a workpiece

Apparatus and method for performing end point detection on a...

Apparatus and method for polish removing a precise amount of mat

Apparatus and method for sequentially polishing and...

Apparatus and method for sequentially polishing and...

Apparatus and method of detecting a substrate in a carrier head

Apparatus and method to test abrasion resistance of material...

Apparatus and methods of automated wafer-grinding using...

Apparatus deterministic magnetorheological finishing of workpiec

Apparatus for accurately measuring local thickness of...