Apparatus and method for controlling polishing of integrated cir

Details Apparatus and method for controlling polishing of integrated cir Apparatus and method for controlling polishing of integrated cir

1999-01-06

2000-08-15

Butler, Rodney A.

Abrading

Precision device or process - or with condition responsive...

With indicating

451285, 451288, B24B 4900, B24B 5100

Patent

active

061027766

ABSTRACT:
A system for polishing a surface. The surface is positioned in contact with a rotating table having a polishing slurry or compound applied to a table surface. The pattern formed in the polishing compound as the table is rotated is monitored, and when the pattern dimensions reach a predetermined size, indicating a polished end point, the polisher ends polishing.

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