4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Vladimir Vital'evitch Ivanov

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Electromagnetic radiation source, lithographic apparatus,...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
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Ex-situ removal of deposition on an optical element

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic apparatus having a debris-mitigation system, a...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
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Lithographic apparatus with contamination suppression,...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
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Profile ID: LFUS-PAI-P-3300534

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