Ex-situ removal of deposition on an optical element

Details Ex-situ removal of deposition on an optical element Ex-situ removal of deposition on an optical element

2005-09-27

2008-05-13

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C134S001000

Reexamination Certificate

active

07372058

ABSTRACT:
A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an opening in a collector chamber. The collector chamber opening may be large enough to pass the radiation collector and the support member. The removed radiation collector can be cleaned with different cleaning procedures, which may be performed in a cleaning device. Such cleaning device may for example consist of the following: a circumferential hull designed to provide an enclosure volume for circumferentially enclosing at least the radiation collector; an inlet configured to provide at least one of a cleaning gas and a cleaning liquid to the enclosure volume to clean at least said radiation collector; and an outlet configured to remove said at least one of said cleaning gas and said cleaning liquid from the enclosure volume.

REFERENCES:
patent: 6657206 (2003-12-01), Keogh et al.
patent: 2006/0175558 (2006-08-01), Bakker et al.

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