Electromagnetic radiation source, lithographic apparatus,...

Radiant energy – Radiant energy generation and sources – With radiation modifying member

Reexamination Certificate

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C378S119000

Reexamination Certificate

active

07462851

ABSTRACT:
A device for generating radiation source based on a discharge includes a cathode and an anode. A discharge is created in a material comprising an alloy of two or more substances.

REFERENCES:
patent: 6002744 (1999-12-01), Hertz et al.
patent: 2004/0105082 (2004-06-01), Koshelev et al.
patent: 2004/0141165 (2004-07-01), Zukavishvili et al.
patent: 2005/0077483 (2005-04-01), Bakker et al.
patent: 2006/0011864 (2006-01-01), Koshelev et al.
patent: 2007/0273282 (2007-11-01), Radkov et al.

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