4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Thomas Klose

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Deflectable micromechanical system and use thereof

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate

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Method for the compensation of deviations occurring as a...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Micromechanical device with adjustable resonant frequency by...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Micromechanical device with tilted electrodes

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Micromechanical optical element having a reflective surface...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Profile ID: LFUS-PAI-P-2166389

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