Micromechanical device with tilted electrodes

Details Micromechanical device with tilted electrodes Micromechanical device with tilted electrodes

2008-03-31

2008-12-16

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S198100

Reexamination Certificate

active

07466474

ABSTRACT:
A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.

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