Deflectable micromechanical system and use thereof

Details Deflectable micromechanical system and use thereof Deflectable micromechanical system and use thereof

2006-02-03

2010-11-30

Noori, Max (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S760000

Reexamination Certificate

active

07841242

ABSTRACT:
The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.

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Tortonese et al., “Atomic Force Microscopy Using a Piezoresistive Cantilever,” Proc. Intl Conf. Solid State Sensors and Actuators (Jun. 24, 1991).

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