4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Rodney T Hodgson

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Apparatus and method for rapid thermal processing

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Apparatus and method for rapid thermal processing (RTP) of a plu

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Patent

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Method and apparatus for rapid thermal processing

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Method for rapid thermal processing (RTP) of silicon substrates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Method of rapid thermal processing (RTP) of ion implanted silico

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-870615

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