Method and apparatus for rapid thermal processing

Details Method and apparatus for rapid thermal processing Method and apparatus for rapid thermal processing

1995-10-02

1999-01-19

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219405, 118725, 118 501, H01L 21324, H05B 100, C23C 1600

Patent

active

058616098

ABSTRACT:
A thin visible and near IR absorbing plate is placed between the radiation source and the object to be processed in a rapid thermal processing system. The object is heated in part by the near IR and far IR radiation from the thin plate, and the material and optically induced heating inhomogeneities are reduced.

REFERENCES:
patent: 5011794 (1991-04-01), Grim et al.
patent: 5318362 (1994-06-01), Schietinger et al.
patent: 5336641 (1994-08-01), Fair et al.
patent: 5439850 (1995-08-01), Ozturk et al.
patent: 5446824 (1995-08-01), Moslehi
patent: 5551985 (1996-09-01), Brors et al.
patent: 5576059 (1996-11-01), Beinglass et al.

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