4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ofer Sneh

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ALD apparatus and method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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ALD apparatus and method

Coating processes – Coating by vapor – gas – or smoke
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ALD apparatus and method

Coating apparatus – Gas or vapor deposition – With treating means
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ALD method and apparatus

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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ALD method and apparatus

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-321619

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