ALD apparatus and method

Details ALD apparatus and method ALD apparatus and method

2005-03-10

2009-12-22

Meeks, Timothy (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Reexamination Certificate

active

07635502

ABSTRACT:
An apparatus and method for atomic layer deposition with improved efficiency of both chemical dose and purge is presented. The apparatus includes an integrated equipment and procedure for chamber maintenance.

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