Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Adopting feature of buried electrically conductive layer in...
Adopting feature of buried electrically conductive layer in...
Adopting feature of buried electrically conductive layer in...
Anisotropic stress generation by stress-generating liners...
Back end interconnect with a shaped interface
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