4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Keath T Chen

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Adjustable shielding plate for adjusting an etching area of...

Coating apparatus – With means to apply electrical and/or radiant energy to work... – Electrostatic and/or electromagnetic attraction or...
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Ampule tray for and method of precursor surface area

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
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Apparatus and methods to remove films on bevel edge and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
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Apparatus for aligning electrodes in a process chamber to...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for an optimized plasma chamber grounded electrode...

Coating apparatus – Gas or vapor deposition – With treating means
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Profile ID: LFUS-PAI-P-2161120

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