4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Keath Chen

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Apparatus for catching byproducts in semiconductor device...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
Reexamination Certificate

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Apparatus for depositing an organic layer and method for...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Apparatus for trapping residual products in semiconductor...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
Reexamination Certificate

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Crucible heating apparatus and deposition apparatus...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Gas modulation to control edge exclusion in a bevel edge...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3168621

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