Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2008-08-22
2011-12-13
Chen, Keath (Department: 1716)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S727000
Reexamination Certificate
active
08075693
ABSTRACT:
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
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English translation JP 11-222667, Negishi, Aug. 1999.
Korean Notice of Allowance issued on Sep. 9, 2009 in the corresponding Korean Patent Application No. 10-2007-0084933.
Jung Myung-Jong
Kang Tae-Min
Kim Sun-Hoe
Lee Sang-Bong
Lee Seung-Mook
Chen Keath
Christie Parker & Hale LLP
Samsung Mobile Display Co., Ltd.
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