4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Jay Anderson

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Apparatus and method of producing a negative ion plasma

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Defect monitor and method for automated contactless inline wafer

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
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Etching of silicon nitride

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Method of making flexible interconnections with dual-metal-dual-

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Process for reducing pattern factor effects in CMP planarization

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-873429

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