4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Genichi Komuro

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Method for forming ferroelectric capacitor and method for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Plasma etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma etching method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Semiconductor device and method for manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Semiconductor device and method of manufacturing the same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-908963

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