Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
Inventor
active
Application of thin crystalline Si.sub.3 N.sub.4 liners in shal
Application of thin crystalline Si.sub.3 N.sub.4 liners in shall
Buried strap formation in a DRAM trench capacitor
Buried-strap formation in a dram trench capacitor
Controlled recrystallization of buried strap in a semiconductor
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