Stock material or miscellaneous articles
All metal or with adjacent metals
Plural layers discontinuously bonded
Inventor
active
Approach to optimizing an ILD argon sputter process
Deposition of an inter layer dielectric formed on semiconductor
Design structures of and simplified methods for forming...
DSAD process for deposition of inter layer dielectric
In-situ pre-ILD deposition treatment to improve ILD to metal adh
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