4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition

Alexander J. Pasadyn

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Applying a self-adaptive filter to a drifting process

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Determining a next tool state based on fault detection...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Determining transmission of error effects for improving...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Dispatch and/or disposition of material based upon an...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Dynamic lot allocation based upon wafer state...

Abrading – Precision device or process - or with condition responsive... – With indicating
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Profile ID: LFUS-PAI-P-2452792

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