Applying a self-adaptive filter to a drifting process

Details Applying a self-adaptive filter to a drifting process Applying a self-adaptive filter to a drifting process

2002-12-18

2008-09-09

Nghiem, Michael P (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S181000

Reexamination Certificate

active

07424392

ABSTRACT:
A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.

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