Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-06-28
2005-06-28
Von Buhr, Maria N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
Reexamination Certificate
active
06912433
ABSTRACT:
A method and apparatus are provided for determining a next tool state based on fault detection information. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data and estimating a next state of the processing tool based on at least the determined portion of the noise.
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Chong Robert J.
Green Eric O.
Miller Michael L.
Pasadyn Alexander J.
Advanced Mirco Devices, Inc.
Von Buhr Maria N.
Williams Morgan & Amerson P.C.
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