Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-03
2006-10-03
Bahta, Kidest (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S109000, C714S051000, C427S010000
Reexamination Certificate
active
07117062
ABSTRACT:
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.
REFERENCES:
patent: 5661669 (1997-08-01), Mozumder et al.
patent: 5801965 (1998-09-01), Takagi et al.
patent: 6522939 (2003-02-01), Strauch et al.
Chong Robert J.
Cusson Brian K.
Pasadyn Alexander J.
Sonderman Thomas J.
Advanced Micro Devices , Inc.
Bahta Kidest
Williams Morgan & Amerson P.C.
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