4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Akitaka Shimizu

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate
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Dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etching method and computer storage medium storing program...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fine pattern forming method

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-2172424

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