Etching method and computer storage medium storing program...

Details Etching method and computer storage medium storing program... Etching method and computer storage medium storing program...

2007-08-14

2007-08-14

Chen, Kin-Chan (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S694000, C438S723000

Reexamination Certificate

active

10943983

ABSTRACT:
An etching method of the present invention includes a first and a second process. In the first process, pattern widths of a pre-patterned mask layer are increased by depositing plasma reaction products on sidewalls of the mask layer. In the second process, a layer to be etched is etched by using the mask layer as a mask having increased the pattern widths. Therefore, mask layers having different pattern densities exist in the same wafer and pattern widths of mask layers patterned through a photolithography process are uneven according to pattern densities, each pattern width of the mask layers can be made uniform. Accordingly, the pattern widths of the layer can be made uniform over an entire wafer.

REFERENCES:
patent: 6291312 (2001-09-01), Chan et al.
patent: 6461969 (2002-10-01), Lee et al.
patent: 6569774 (2003-05-01), Trapp
patent: 6635185 (2003-10-01), Demmin et al.
patent: 6955961 (2005-10-01), Chung
patent: 2004/0097077 (2004-05-01), Nallan et al.
patent: 2004/0224524 (2004-11-01), Koenig et al.

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